7/14/2010	9:49:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2010	9:49:05 AM	Recipe started at 9:49 AM
7/14/2010	9:49:05 AM	H2 valve closed
7/14/2010	9:49:05 AM	BCl3 valve closed
7/14/2010	9:49:05 AM	PH3 valve closed
7/14/2010	9:49:05 AM	SiCl4 pre valve closed
7/14/2010	9:49:05 AM	SiCl4 post valve closed
7/14/2010	9:49:05 AM	Main Vac valve closed
7/14/2010	9:49:05 AM	Bypass valve closed
7/14/2010	9:49:05 AM	Bubbler valve closed
7/14/2010	9:49:05 AM	Helium valve opened
7/14/2010	9:49:05 AM	Helium MFC set to  500.000000
7/14/2010	9:49:05 AM	H2 MFC set to  0.000000
7/14/2010	9:49:05 AM	BCl3 MFC set to  0.000000
7/14/2010	9:49:05 AM	PHl3 MFC set to  0.000000
7/14/2010	9:49:05 AM	SiCl4 MFC set to  0.000000
7/14/2010	9:49:05 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	9:49:05 AM	Tube furnace set to 0
7/14/2010	9:49:10 AM	Helium valve closed
7/14/2010	9:49:10 AM	H2 valve closed
7/14/2010	9:49:10 AM	BCl3 valve closed
7/14/2010	9:49:10 AM	PH3 valve closed
7/14/2010	9:49:10 AM	SiCl4 pre valve closed
7/14/2010	9:49:10 AM	SiCl4 post valve closed
7/14/2010	9:49:10 AM	Main Vac valve closed
7/14/2010	9:49:10 AM	Bypass valve closed
7/14/2010	9:49:10 AM	Bubbler valve closed
7/14/2010	9:49:10 AM	Helium MFC set to  0.000000
7/14/2010	9:49:10 AM	H2 MFC set to  0.000000
7/14/2010	9:49:10 AM	BCl3 MFC set to  0.000000
7/14/2010	9:49:10 AM	PHl3 MFC set to  0.000000
7/14/2010	9:49:10 AM	SiCl4 MFC set to  0.000000
7/14/2010	9:49:10 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	9:49:10 AM	Tube furnace set to 0
7/14/2010	9:49:10 AM	Run finished at 9:49 AM
7/14/2010	9:49:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2010	9:54:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	9:54:18 AM	Recipe started at 9:54 AM
7/14/2010	9:54:18 AM	Helium valve closed
7/14/2010	9:54:18 AM	H2 valve closed
7/14/2010	9:54:18 AM	BCl3 valve closed
7/14/2010	9:54:18 AM	PH3 valve closed
7/14/2010	9:54:18 AM	SiCl4 pre valve closed
7/14/2010	9:54:18 AM	SiCl4 post valve closed
7/14/2010	9:54:18 AM	Main Vac valve closed
7/14/2010	9:54:18 AM	Bubbler valve closed
7/14/2010	9:54:18 AM	Bypass valve opened
7/14/2010	9:54:18 AM	Helium MFC set to  0.000000
7/14/2010	9:54:18 AM	H2 MFC set to  0.000000
7/14/2010	9:54:18 AM	BCl3 MFC set to  0.000000
7/14/2010	9:54:18 AM	PHl3 MFC set to  0.000000
7/14/2010	9:54:18 AM	SiCl4 MFC set to  0.000000
7/14/2010	9:54:18 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	9:54:18 AM	Tube furnace set to 0
7/14/2010	9:54:50 AM	Helium valve closed
7/14/2010	9:54:50 AM	H2 valve closed
7/14/2010	9:54:50 AM	BCl3 valve closed
7/14/2010	9:54:50 AM	PH3 valve closed
7/14/2010	9:54:50 AM	SiCl4 pre valve closed
7/14/2010	9:54:50 AM	SiCl4 post valve closed
7/14/2010	9:54:50 AM	Bubbler valve closed
7/14/2010	9:54:50 AM	Main Vac valve opened
7/14/2010	9:54:50 AM	Bypass valve opened
7/14/2010	9:54:50 AM	Helium MFC set to  0.000000
7/14/2010	9:54:50 AM	H2 MFC set to  0.000000
7/14/2010	9:54:50 AM	BCl3 MFC set to  0.000000
7/14/2010	9:54:50 AM	PHl3 MFC set to  0.000000
7/14/2010	9:54:50 AM	SiCl4 MFC set to  0.000000
7/14/2010	9:54:50 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	9:54:51 AM	Tube furnace set to 0
7/14/2010	9:54:51 AM	Run finished at 9:54 AM
7/14/2010	9:54:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	11:02:05 AM	Bypass valve closed
7/14/2010	11:02:05 AM	Main Vac valve closed
7/14/2010	11:02:11 AM	Bypass valve opened
7/14/2010	11:02:12 AM	Main Vac valve opened
7/14/2010	11:02:16 AM	Helium MFC set to  100.000000
7/14/2010	11:02:18 AM	Helium valve opened
7/14/2010	11:11:58 AM	Helium valve closed
7/14/2010	11:18:48 AM	Bypass valve closed
7/14/2010	11:18:49 AM	Main Vac valve closed
7/14/2010	11:18:54 AM	Main Vac valve opened
7/14/2010	11:18:55 AM	Bypass valve opened
7/14/2010	11:19:51 AM	Tube furnace set to 100
7/14/2010	11:22:09 AM	Tube furnace set to 0
7/14/2010	11:22:19 AM	Recipe started at 11:22 AM
7/14/2010	11:22:19 AM	Helium valve closed
7/14/2010	11:22:19 AM	BCl3 valve closed
7/14/2010	11:22:19 AM	PH3 valve closed
7/14/2010	11:22:19 AM	SiCl4 pre valve closed
7/14/2010	11:22:19 AM	SiCl4 post valve closed
7/14/2010	11:22:19 AM	Main Vac valve closed
7/14/2010	11:22:19 AM	Bypass valve closed
7/14/2010	11:22:19 AM	Bubbler valve closed
7/14/2010	11:22:19 AM	H2 valve opened
7/14/2010	11:22:19 AM	Helium MFC set to  0.000000
7/14/2010	11:22:19 AM	H2 MFC set to  500.000000
7/14/2010	11:22:19 AM	BCl3 MFC set to  0.000000
7/14/2010	11:22:19 AM	PHl3 MFC set to  0.000000
7/14/2010	11:22:19 AM	SiCl4 MFC set to  0.000000
7/14/2010	11:22:19 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	11:22:20 AM	Tube furnace set to 0
7/14/2010	11:23:40 AM	Helium valve closed
7/14/2010	11:23:40 AM	BCl3 valve closed
7/14/2010	11:23:40 AM	PH3 valve closed
7/14/2010	11:23:40 AM	SiCl4 pre valve closed
7/14/2010	11:23:40 AM	SiCl4 post valve closed
7/14/2010	11:23:40 AM	Main Vac valve closed
7/14/2010	11:23:40 AM	Bypass valve closed
7/14/2010	11:23:40 AM	H2 valve opened
7/14/2010	11:23:40 AM	Bubbler valve opened
7/14/2010	11:23:40 AM	Helium MFC set to  0.000000
7/14/2010	11:23:40 AM	H2 MFC set to  500.000000
7/14/2010	11:23:40 AM	BCl3 MFC set to  0.000000
7/14/2010	11:23:40 AM	PHl3 MFC set to  0.000000
7/14/2010	11:23:40 AM	SiCl4 MFC set to  0.000000
7/14/2010	11:23:40 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	11:23:41 AM	Tube furnace set to 1000
7/14/2010	11:29:33 AM	Helium valve closed
7/14/2010	11:29:33 AM	H2 valve closed
7/14/2010	11:29:33 AM	BCl3 valve closed
7/14/2010	11:29:33 AM	PH3 valve closed
7/14/2010	11:29:33 AM	SiCl4 pre valve closed
7/14/2010	11:29:33 AM	SiCl4 post valve closed
7/14/2010	11:29:33 AM	Main Vac valve closed
7/14/2010	11:29:33 AM	Bubbler valve closed
7/14/2010	11:29:33 AM	Bypass valve opened
7/14/2010	11:29:33 AM	Helium MFC set to  0.000000
7/14/2010	11:29:33 AM	H2 MFC set to  0.000000
7/14/2010	11:29:33 AM	BCl3 MFC set to  0.000000
7/14/2010	11:29:33 AM	PHl3 MFC set to  0.000000
7/14/2010	11:29:33 AM	SiCl4 MFC set to  0.000000
7/14/2010	11:29:33 AM	Bypass solenoid MFC set to  760.000000
7/14/2010	11:29:33 AM	Tube furnace set to 0
7/14/2010	11:29:33 AM	Baratron reads 900.567492 Torr.  Emergency exit.
7/14/2010	11:40:00 AM	Run aborted at 11:40 AM
7/14/2010	11:40:53 AM	Program exited cleanly
7/14/2010	11:40:55 AM	Program started normally
7/14/2010	11:40:55 AM	Helium valve closed
7/14/2010	11:40:56 AM	H2 valve closed
7/14/2010	11:40:56 AM	BCl3 valve closed
7/14/2010	11:40:56 AM	PH3 valve closed
7/14/2010	11:40:56 AM	SiCl4 pre valve closed
7/14/2010	11:40:56 AM	SiCl4 post valve closed
7/14/2010	11:40:56 AM	Main Vac valve closed
7/14/2010	11:40:56 AM	Bypass valve closed
7/14/2010	11:40:56 AM	Bubbler valve closed
7/14/2010	11:40:56 AM	Helium MFC set to  0.000000
7/14/2010	11:40:56 AM	H2 MFC set to  0.000000
7/14/2010	11:40:56 AM	BCl3 MFC set to  0.000000
7/14/2010	11:40:56 AM	PHl3 MFC set to  0.000000
7/14/2010	11:40:56 AM	SiCl4 MFC set to  0.000000
7/14/2010	11:40:56 AM	Bypass solenoid MFC set to  760.000000
7/14/2010	11:40:56 AM	Tube furnace set to 0
7/14/2010	11:41:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2010	11:41:05 AM	Recipe started at 11:41 AM
7/14/2010	11:41:05 AM	H2 valve closed
7/14/2010	11:41:05 AM	BCl3 valve closed
7/14/2010	11:41:05 AM	PH3 valve closed
7/14/2010	11:41:05 AM	SiCl4 pre valve closed
7/14/2010	11:41:05 AM	SiCl4 post valve closed
7/14/2010	11:41:05 AM	Main Vac valve closed
7/14/2010	11:41:05 AM	Bypass valve closed
7/14/2010	11:41:05 AM	Bubbler valve closed
7/14/2010	11:41:05 AM	Helium valve opened
7/14/2010	11:41:05 AM	Helium MFC set to  500.000000
7/14/2010	11:41:05 AM	H2 MFC set to  0.000000
7/14/2010	11:41:05 AM	BCl3 MFC set to  0.000000
7/14/2010	11:41:05 AM	PHl3 MFC set to  0.000000
7/14/2010	11:41:05 AM	SiCl4 MFC set to  0.000000
7/14/2010	11:41:05 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	11:41:05 AM	Tube furnace set to 0
7/14/2010	11:42:16 AM	Helium valve closed
7/14/2010	11:42:16 AM	H2 valve closed
7/14/2010	11:42:16 AM	BCl3 valve closed
7/14/2010	11:42:16 AM	PH3 valve closed
7/14/2010	11:42:16 AM	SiCl4 pre valve closed
7/14/2010	11:42:16 AM	SiCl4 post valve closed
7/14/2010	11:42:16 AM	Main Vac valve closed
7/14/2010	11:42:16 AM	Bypass valve closed
7/14/2010	11:42:16 AM	Bubbler valve closed
7/14/2010	11:42:16 AM	Helium MFC set to  0.000000
7/14/2010	11:42:16 AM	H2 MFC set to  0.000000
7/14/2010	11:42:16 AM	BCl3 MFC set to  0.000000
7/14/2010	11:42:16 AM	PHl3 MFC set to  0.000000
7/14/2010	11:42:16 AM	SiCl4 MFC set to  0.000000
7/14/2010	11:42:16 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	11:42:16 AM	Tube furnace set to 0
7/14/2010	11:42:17 AM	Run finished at 11:42 AM
7/14/2010	11:42:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2010	11:50:05 AM	Helium MFC set to  500.000000
7/14/2010	11:50:10 AM	Helium valve opened
7/14/2010	11:50:19 AM	Bubbler valve opened
7/14/2010	11:50:23 AM	Bubbler valve closed
7/14/2010	11:50:24 AM	Helium valve closed
7/14/2010	11:52:15 AM	Bubbler valve opened
7/14/2010	11:52:16 AM	Bubbler valve closed
7/14/2010	11:52:18 AM	Helium valve opened
7/14/2010	11:52:22 AM	Bubbler valve opened
7/14/2010	11:52:27 AM	Bubbler valve closed
7/14/2010	11:52:28 AM	Helium valve closed
7/14/2010	11:52:55 AM	Helium valve opened
7/14/2010	11:52:59 AM	Bubbler valve opened
7/14/2010	11:53:50 AM	Bubbler valve closed
7/14/2010	11:53:52 AM	Helium valve closed
7/14/2010	11:54:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	11:54:08 AM	Recipe started at 11:54 AM
7/14/2010	11:54:08 AM	Helium valve closed
7/14/2010	11:54:08 AM	H2 valve closed
7/14/2010	11:54:08 AM	BCl3 valve closed
7/14/2010	11:54:08 AM	PH3 valve closed
7/14/2010	11:54:08 AM	SiCl4 pre valve closed
7/14/2010	11:54:08 AM	SiCl4 post valve closed
7/14/2010	11:54:08 AM	Main Vac valve closed
7/14/2010	11:54:08 AM	Bubbler valve closed
7/14/2010	11:54:08 AM	Bypass valve opened
7/14/2010	11:54:08 AM	Helium MFC set to  0.000000
7/14/2010	11:54:08 AM	H2 MFC set to  0.000000
7/14/2010	11:54:08 AM	BCl3 MFC set to  0.000000
7/14/2010	11:54:08 AM	PHl3 MFC set to  0.000000
7/14/2010	11:54:08 AM	SiCl4 MFC set to  0.000000
7/14/2010	11:54:08 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	11:54:09 AM	Tube furnace set to 0
7/14/2010	11:54:33 AM	Helium valve closed
7/14/2010	11:54:33 AM	H2 valve closed
7/14/2010	11:54:33 AM	BCl3 valve closed
7/14/2010	11:54:33 AM	PH3 valve closed
7/14/2010	11:54:33 AM	SiCl4 pre valve closed
7/14/2010	11:54:33 AM	SiCl4 post valve closed
7/14/2010	11:54:33 AM	Bubbler valve closed
7/14/2010	11:54:33 AM	Main Vac valve opened
7/14/2010	11:54:33 AM	Bypass valve opened
7/14/2010	11:54:33 AM	Helium MFC set to  0.000000
7/14/2010	11:54:33 AM	H2 MFC set to  0.000000
7/14/2010	11:54:33 AM	BCl3 MFC set to  0.000000
7/14/2010	11:54:33 AM	PHl3 MFC set to  0.000000
7/14/2010	11:54:33 AM	SiCl4 MFC set to  0.000000
7/14/2010	11:54:33 AM	Bypass solenoid MFC set to  0.000000
7/14/2010	11:54:33 AM	Tube furnace set to 0
7/14/2010	11:54:34 AM	Run finished at 11:54 AM
7/14/2010	11:54:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	12:12:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2010	12:12:25 PM	Recipe started at 12:12 PM
7/14/2010	12:12:25 PM	H2 valve closed
7/14/2010	12:12:25 PM	BCl3 valve closed
7/14/2010	12:12:25 PM	PH3 valve closed
7/14/2010	12:12:25 PM	SiCl4 pre valve closed
7/14/2010	12:12:25 PM	SiCl4 post valve closed
7/14/2010	12:12:25 PM	Main Vac valve closed
7/14/2010	12:12:25 PM	Bypass valve closed
7/14/2010	12:12:25 PM	Bubbler valve closed
7/14/2010	12:12:25 PM	Helium valve opened
7/14/2010	12:12:25 PM	Helium MFC set to  500.000000
7/14/2010	12:12:25 PM	H2 MFC set to  0.000000
7/14/2010	12:12:25 PM	BCl3 MFC set to  0.000000
7/14/2010	12:12:25 PM	PHl3 MFC set to  0.000000
7/14/2010	12:12:25 PM	SiCl4 MFC set to  0.000000
7/14/2010	12:12:25 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	12:12:25 PM	Tube furnace set to 0
7/14/2010	12:13:45 PM	Helium valve closed
7/14/2010	12:13:45 PM	H2 valve closed
7/14/2010	12:13:45 PM	BCl3 valve closed
7/14/2010	12:13:45 PM	PH3 valve closed
7/14/2010	12:13:45 PM	SiCl4 pre valve closed
7/14/2010	12:13:45 PM	SiCl4 post valve closed
7/14/2010	12:13:45 PM	Main Vac valve closed
7/14/2010	12:13:45 PM	Bypass valve closed
7/14/2010	12:13:45 PM	Bubbler valve closed
7/14/2010	12:13:45 PM	Helium MFC set to  0.000000
7/14/2010	12:13:45 PM	H2 MFC set to  0.000000
7/14/2010	12:13:45 PM	BCl3 MFC set to  0.000000
7/14/2010	12:13:45 PM	PHl3 MFC set to  0.000000
7/14/2010	12:13:45 PM	SiCl4 MFC set to  0.000000
7/14/2010	12:13:45 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	12:13:45 PM	Tube furnace set to 0
7/14/2010	12:13:45 PM	Run finished at 12:13 PM
7/14/2010	12:13:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2010	12:15:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	12:15:53 PM	Recipe started at 12:15 PM
7/14/2010	12:15:53 PM	Helium valve closed
7/14/2010	12:15:53 PM	H2 valve closed
7/14/2010	12:15:53 PM	BCl3 valve closed
7/14/2010	12:15:53 PM	PH3 valve closed
7/14/2010	12:15:53 PM	SiCl4 pre valve closed
7/14/2010	12:15:53 PM	SiCl4 post valve closed
7/14/2010	12:15:53 PM	Main Vac valve closed
7/14/2010	12:15:53 PM	Bubbler valve closed
7/14/2010	12:15:53 PM	Bypass valve opened
7/14/2010	12:15:53 PM	Helium MFC set to  0.000000
7/14/2010	12:15:53 PM	H2 MFC set to  0.000000
7/14/2010	12:15:53 PM	BCl3 MFC set to  0.000000
7/14/2010	12:15:53 PM	PHl3 MFC set to  0.000000
7/14/2010	12:15:53 PM	SiCl4 MFC set to  0.000000
7/14/2010	12:15:53 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	12:15:53 PM	Tube furnace set to 0
7/14/2010	12:16:27 PM	Helium valve closed
7/14/2010	12:16:27 PM	H2 valve closed
7/14/2010	12:16:27 PM	BCl3 valve closed
7/14/2010	12:16:27 PM	PH3 valve closed
7/14/2010	12:16:27 PM	SiCl4 pre valve closed
7/14/2010	12:16:27 PM	SiCl4 post valve closed
7/14/2010	12:16:27 PM	Bubbler valve closed
7/14/2010	12:16:27 PM	Main Vac valve opened
7/14/2010	12:16:27 PM	Bypass valve opened
7/14/2010	12:16:27 PM	Helium MFC set to  0.000000
7/14/2010	12:16:27 PM	H2 MFC set to  0.000000
7/14/2010	12:16:27 PM	BCl3 MFC set to  0.000000
7/14/2010	12:16:27 PM	PHl3 MFC set to  0.000000
7/14/2010	12:16:27 PM	SiCl4 MFC set to  0.000000
7/14/2010	12:16:27 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	12:16:27 PM	Tube furnace set to 0
7/14/2010	12:16:28 PM	Run finished at 12:16 PM
7/14/2010	12:16:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	1:35:40 PM	Tube furnace set to 100
7/14/2010	1:36:12 PM	Main Vac valve closed
7/14/2010	1:36:12 PM	Bypass valve closed
7/14/2010	1:36:18 PM	Main Vac valve opened
7/14/2010	1:36:18 PM	Bypass valve opened
7/14/2010	1:38:57 PM	Tube furnace set to 0
7/14/2010	1:39:09 PM	Recipe started at 1:39 PM
7/14/2010	1:39:09 PM	Helium valve closed
7/14/2010	1:39:09 PM	BCl3 valve closed
7/14/2010	1:39:09 PM	PH3 valve closed
7/14/2010	1:39:09 PM	SiCl4 pre valve closed
7/14/2010	1:39:09 PM	SiCl4 post valve closed
7/14/2010	1:39:09 PM	Main Vac valve closed
7/14/2010	1:39:09 PM	Bypass valve closed
7/14/2010	1:39:09 PM	Bubbler valve closed
7/14/2010	1:39:09 PM	H2 valve opened
7/14/2010	1:39:09 PM	Helium MFC set to  0.000000
7/14/2010	1:39:09 PM	H2 MFC set to  500.000000
7/14/2010	1:39:09 PM	BCl3 MFC set to  0.000000
7/14/2010	1:39:09 PM	PHl3 MFC set to  0.000000
7/14/2010	1:39:09 PM	SiCl4 MFC set to  0.000000
7/14/2010	1:39:09 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	1:39:09 PM	Tube furnace set to 100
7/14/2010	1:40:30 PM	Helium valve closed
7/14/2010	1:40:30 PM	BCl3 valve closed
7/14/2010	1:40:30 PM	PH3 valve closed
7/14/2010	1:40:30 PM	SiCl4 pre valve closed
7/14/2010	1:40:30 PM	SiCl4 post valve closed
7/14/2010	1:40:30 PM	Main Vac valve closed
7/14/2010	1:40:30 PM	Bypass valve closed
7/14/2010	1:40:30 PM	H2 valve opened
7/14/2010	1:40:30 PM	Bubbler valve opened
7/14/2010	1:40:30 PM	Helium MFC set to  0.000000
7/14/2010	1:40:30 PM	H2 MFC set to  500.000000
7/14/2010	1:40:30 PM	BCl3 MFC set to  0.000000
7/14/2010	1:40:30 PM	PHl3 MFC set to  0.000000
7/14/2010	1:40:30 PM	SiCl4 MFC set to  0.000000
7/14/2010	1:40:30 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	1:40:30 PM	Tube furnace set to 1000
7/14/2010	2:00:30 PM	Helium valve closed
7/14/2010	2:00:30 PM	PH3 valve closed
7/14/2010	2:00:30 PM	Main Vac valve closed
7/14/2010	2:00:30 PM	Bypass valve closed
7/14/2010	2:00:30 PM	H2 valve opened
7/14/2010	2:00:30 PM	BCl3 valve opened
7/14/2010	2:00:30 PM	SiCl4 pre valve opened
7/14/2010	2:00:30 PM	SiCl4 post valve opened
7/14/2010	2:00:30 PM	Bubbler valve opened
7/14/2010	2:00:30 PM	Helium MFC set to  0.000000
7/14/2010	2:00:30 PM	H2 MFC set to  500.000000
7/14/2010	2:00:30 PM	BCl3 MFC set to  15.000000
7/14/2010	2:00:30 PM	PHl3 MFC set to  0.000000
7/14/2010	2:00:30 PM	SiCl4 MFC set to  50.000000
7/14/2010	2:00:30 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	2:00:30 PM	Tube furnace set to 1000
7/14/2010	2:08:30 PM	H2 valve closed
7/14/2010	2:08:30 PM	BCl3 valve closed
7/14/2010	2:08:30 PM	PH3 valve closed
7/14/2010	2:08:30 PM	SiCl4 pre valve closed
7/14/2010	2:08:30 PM	SiCl4 post valve closed
7/14/2010	2:08:30 PM	Main Vac valve closed
7/14/2010	2:08:30 PM	Bypass valve closed
7/14/2010	2:08:30 PM	Helium valve opened
7/14/2010	2:08:30 PM	Bubbler valve opened
7/14/2010	2:08:30 PM	Helium MFC set to  500.000000
7/14/2010	2:08:30 PM	H2 MFC set to  0.000000
7/14/2010	2:08:30 PM	BCl3 MFC set to  0.000000
7/14/2010	2:08:30 PM	PHl3 MFC set to  0.000000
7/14/2010	2:08:30 PM	SiCl4 MFC set to  0.000000
7/14/2010	2:08:30 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	2:08:30 PM	Tube furnace set to 0
7/14/2010	2:28:30 PM	Helium valve closed
7/14/2010	2:28:30 PM	H2 valve closed
7/14/2010	2:28:30 PM	BCl3 valve closed
7/14/2010	2:28:30 PM	PH3 valve closed
7/14/2010	2:28:30 PM	SiCl4 pre valve closed
7/14/2010	2:28:30 PM	SiCl4 post valve closed
7/14/2010	2:28:30 PM	Main Vac valve closed
7/14/2010	2:28:30 PM	Bypass valve closed
7/14/2010	2:28:30 PM	Bubbler valve closed
7/14/2010	2:28:30 PM	Helium MFC set to  0.000000
7/14/2010	2:28:30 PM	H2 MFC set to  0.000000
7/14/2010	2:28:30 PM	BCl3 MFC set to  0.000000
7/14/2010	2:28:30 PM	PHl3 MFC set to  0.000000
7/14/2010	2:28:30 PM	SiCl4 MFC set to  0.000000
7/14/2010	2:28:30 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	2:28:30 PM	Tube furnace set to 0
7/14/2010	2:28:31 PM	Run finished at 2:28 PM
7/14/2010	2:39:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	2:39:15 PM	Recipe started at 2:39 PM
7/14/2010	2:39:15 PM	Helium valve closed
7/14/2010	2:39:15 PM	H2 valve closed
7/14/2010	2:39:15 PM	BCl3 valve closed
7/14/2010	2:39:15 PM	PH3 valve closed
7/14/2010	2:39:15 PM	SiCl4 pre valve closed
7/14/2010	2:39:15 PM	SiCl4 post valve closed
7/14/2010	2:39:15 PM	Main Vac valve closed
7/14/2010	2:39:15 PM	Bubbler valve closed
7/14/2010	2:39:15 PM	Bypass valve opened
7/14/2010	2:39:15 PM	Helium MFC set to  0.000000
7/14/2010	2:39:15 PM	H2 MFC set to  0.000000
7/14/2010	2:39:15 PM	BCl3 MFC set to  0.000000
7/14/2010	2:39:15 PM	PHl3 MFC set to  0.000000
7/14/2010	2:39:15 PM	SiCl4 MFC set to  0.000000
7/14/2010	2:39:15 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	2:39:16 PM	Tube furnace set to 0
7/14/2010	2:39:50 PM	Helium valve closed
7/14/2010	2:39:50 PM	H2 valve closed
7/14/2010	2:39:50 PM	BCl3 valve closed
7/14/2010	2:39:50 PM	PH3 valve closed
7/14/2010	2:39:50 PM	SiCl4 pre valve closed
7/14/2010	2:39:50 PM	SiCl4 post valve closed
7/14/2010	2:39:50 PM	Bubbler valve closed
7/14/2010	2:39:50 PM	Main Vac valve opened
7/14/2010	2:39:50 PM	Bypass valve opened
7/14/2010	2:39:50 PM	Helium MFC set to  0.000000
7/14/2010	2:39:50 PM	H2 MFC set to  0.000000
7/14/2010	2:39:50 PM	BCl3 MFC set to  0.000000
7/14/2010	2:39:50 PM	PHl3 MFC set to  0.000000
7/14/2010	2:39:50 PM	SiCl4 MFC set to  0.000000
7/14/2010	2:39:50 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	2:39:50 PM	Tube furnace set to 0
7/14/2010	2:39:50 PM	Run finished at 2:39 PM
7/14/2010	2:39:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	2:45:47 PM	Helium valve opened
7/14/2010	2:45:50 PM	Helium MFC set to  100.000000
7/14/2010	2:56:26 PM	Helium valve closed
7/14/2010	4:00:47 PM	Bypass valve closed
7/14/2010	4:00:47 PM	Main Vac valve closed
7/14/2010	4:00:54 PM	Main Vac valve opened
7/14/2010	4:00:54 PM	Bypass valve opened
7/14/2010	4:08:57 PM	Recipe started at 4:08 PM
7/14/2010	4:08:57 PM	Helium valve closed
7/14/2010	4:08:57 PM	BCl3 valve closed
7/14/2010	4:08:57 PM	PH3 valve closed
7/14/2010	4:08:57 PM	SiCl4 pre valve closed
7/14/2010	4:08:57 PM	SiCl4 post valve closed
7/14/2010	4:08:57 PM	Main Vac valve closed
7/14/2010	4:08:57 PM	Bypass valve closed
7/14/2010	4:08:57 PM	Bubbler valve closed
7/14/2010	4:08:57 PM	H2 valve opened
7/14/2010	4:08:57 PM	Helium MFC set to  0.000000
7/14/2010	4:08:57 PM	H2 MFC set to  500.000000
7/14/2010	4:08:57 PM	BCl3 MFC set to  0.000000
7/14/2010	4:08:57 PM	PHl3 MFC set to  0.000000
7/14/2010	4:08:57 PM	SiCl4 MFC set to  0.000000
7/14/2010	4:08:57 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	4:08:58 PM	Tube furnace set to 100
7/14/2010	4:10:18 PM	Helium valve closed
7/14/2010	4:10:18 PM	BCl3 valve closed
7/14/2010	4:10:18 PM	PH3 valve closed
7/14/2010	4:10:18 PM	SiCl4 pre valve closed
7/14/2010	4:10:18 PM	SiCl4 post valve closed
7/14/2010	4:10:18 PM	Main Vac valve closed
7/14/2010	4:10:18 PM	Bypass valve closed
7/14/2010	4:10:18 PM	H2 valve opened
7/14/2010	4:10:18 PM	Bubbler valve opened
7/14/2010	4:10:18 PM	Helium MFC set to  0.000000
7/14/2010	4:10:18 PM	H2 MFC set to  500.000000
7/14/2010	4:10:18 PM	BCl3 MFC set to  0.000000
7/14/2010	4:10:18 PM	PHl3 MFC set to  0.000000
7/14/2010	4:10:18 PM	SiCl4 MFC set to  0.000000
7/14/2010	4:10:18 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	4:10:18 PM	Tube furnace set to 1000
7/14/2010	4:30:18 PM	Helium valve closed
7/14/2010	4:30:18 PM	PH3 valve closed
7/14/2010	4:30:18 PM	Main Vac valve closed
7/14/2010	4:30:18 PM	Bypass valve closed
7/14/2010	4:30:18 PM	H2 valve opened
7/14/2010	4:30:18 PM	BCl3 valve opened
7/14/2010	4:30:18 PM	SiCl4 pre valve opened
7/14/2010	4:30:18 PM	SiCl4 post valve opened
7/14/2010	4:30:18 PM	Bubbler valve opened
7/14/2010	4:30:18 PM	Helium MFC set to  0.000000
7/14/2010	4:30:18 PM	H2 MFC set to  500.000000
7/14/2010	4:30:18 PM	BCl3 MFC set to  15.000000
7/14/2010	4:30:18 PM	PHl3 MFC set to  0.000000
7/14/2010	4:30:18 PM	SiCl4 MFC set to  50.000000
7/14/2010	4:30:18 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	4:30:18 PM	Tube furnace set to 1000
7/14/2010	4:34:18 PM	H2 valve closed
7/14/2010	4:34:18 PM	BCl3 valve closed
7/14/2010	4:34:18 PM	PH3 valve closed
7/14/2010	4:34:18 PM	SiCl4 pre valve closed
7/14/2010	4:34:18 PM	SiCl4 post valve closed
7/14/2010	4:34:18 PM	Main Vac valve closed
7/14/2010	4:34:18 PM	Bypass valve closed
7/14/2010	4:34:18 PM	Helium valve opened
7/14/2010	4:34:18 PM	Bubbler valve opened
7/14/2010	4:34:18 PM	Helium MFC set to  500.000000
7/14/2010	4:34:18 PM	H2 MFC set to  0.000000
7/14/2010	4:34:18 PM	BCl3 MFC set to  0.000000
7/14/2010	4:34:18 PM	PHl3 MFC set to  0.000000
7/14/2010	4:34:18 PM	SiCl4 MFC set to  0.000000
7/14/2010	4:34:18 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	4:34:18 PM	Tube furnace set to 0
7/14/2010	4:54:18 PM	Helium valve closed
7/14/2010	4:54:18 PM	H2 valve closed
7/14/2010	4:54:18 PM	BCl3 valve closed
7/14/2010	4:54:18 PM	PH3 valve closed
7/14/2010	4:54:18 PM	SiCl4 pre valve closed
7/14/2010	4:54:18 PM	SiCl4 post valve closed
7/14/2010	4:54:18 PM	Main Vac valve closed
7/14/2010	4:54:18 PM	Bypass valve closed
7/14/2010	4:54:18 PM	Bubbler valve closed
7/14/2010	4:54:18 PM	Helium MFC set to  0.000000
7/14/2010	4:54:18 PM	H2 MFC set to  0.000000
7/14/2010	4:54:18 PM	BCl3 MFC set to  0.000000
7/14/2010	4:54:18 PM	PHl3 MFC set to  0.000000
7/14/2010	4:54:18 PM	SiCl4 MFC set to  0.000000
7/14/2010	4:54:18 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	4:54:19 PM	Tube furnace set to 0
7/14/2010	4:54:19 PM	Run finished at 4:54 PM
7/14/2010	6:21:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	6:21:35 PM	Recipe started at 6:21 PM
7/14/2010	6:21:35 PM	Helium valve closed
7/14/2010	6:21:35 PM	H2 valve closed
7/14/2010	6:21:35 PM	BCl3 valve closed
7/14/2010	6:21:35 PM	PH3 valve closed
7/14/2010	6:21:35 PM	SiCl4 pre valve closed
7/14/2010	6:21:35 PM	SiCl4 post valve closed
7/14/2010	6:21:35 PM	Main Vac valve closed
7/14/2010	6:21:35 PM	Bubbler valve closed
7/14/2010	6:21:35 PM	Bypass valve opened
7/14/2010	6:21:35 PM	Helium MFC set to  0.000000
7/14/2010	6:21:35 PM	H2 MFC set to  0.000000
7/14/2010	6:21:35 PM	BCl3 MFC set to  0.000000
7/14/2010	6:21:35 PM	PHl3 MFC set to  0.000000
7/14/2010	6:21:35 PM	SiCl4 MFC set to  0.000000
7/14/2010	6:21:35 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	6:21:35 PM	Tube furnace set to 0
7/14/2010	6:22:10 PM	Helium valve closed
7/14/2010	6:22:10 PM	H2 valve closed
7/14/2010	6:22:10 PM	BCl3 valve closed
7/14/2010	6:22:10 PM	PH3 valve closed
7/14/2010	6:22:10 PM	SiCl4 pre valve closed
7/14/2010	6:22:10 PM	SiCl4 post valve closed
7/14/2010	6:22:10 PM	Bubbler valve closed
7/14/2010	6:22:10 PM	Main Vac valve opened
7/14/2010	6:22:10 PM	Bypass valve opened
7/14/2010	6:22:10 PM	Helium MFC set to  0.000000
7/14/2010	6:22:10 PM	H2 MFC set to  0.000000
7/14/2010	6:22:10 PM	BCl3 MFC set to  0.000000
7/14/2010	6:22:10 PM	PHl3 MFC set to  0.000000
7/14/2010	6:22:10 PM	SiCl4 MFC set to  0.000000
7/14/2010	6:22:10 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	6:22:10 PM	Tube furnace set to 0
7/14/2010	6:22:11 PM	Run finished at 6:22 PM
7/14/2010	6:22:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	6:25:55 PM	Helium MFC set to  100.000000
7/14/2010	6:25:57 PM	Helium valve opened
7/14/2010	6:30:07 PM	Helium valve closed
7/14/2010	6:30:09 PM	Tube furnace set to 100
7/14/2010	6:32:51 PM	Program exited cleanly
7/14/2010	7:19:35 PM	Program started normally
7/14/2010	7:19:35 PM	Helium valve closed
7/14/2010	7:19:35 PM	H2 valve closed
7/14/2010	7:19:35 PM	BCl3 valve closed
7/14/2010	7:19:35 PM	PH3 valve closed
7/14/2010	7:19:35 PM	SiCl4 pre valve closed
7/14/2010	7:19:35 PM	SiCl4 post valve closed
7/14/2010	7:19:35 PM	Main Vac valve closed
7/14/2010	7:19:35 PM	Bypass valve closed
7/14/2010	7:19:35 PM	Bubbler valve closed
7/14/2010	7:19:35 PM	Helium MFC set to  0.000000
7/14/2010	7:19:35 PM	H2 MFC set to  0.000000
7/14/2010	7:19:35 PM	BCl3 MFC set to  0.000000
7/14/2010	7:19:35 PM	PHl3 MFC set to  0.000000
7/14/2010	7:19:35 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:19:35 PM	Bypass solenoid MFC set to  760.000000
7/14/2010	7:19:35 PM	Tube furnace set to 0
7/14/2010	7:19:39 PM	Main Vac valve opened
7/14/2010	7:19:40 PM	Bypass valve opened
7/14/2010	7:21:26 PM	Recipe started at 7:21 PM
7/14/2010	7:21:26 PM	Helium valve closed
7/14/2010	7:21:26 PM	H2 valve closed
7/14/2010	7:21:26 PM	BCl3 valve closed
7/14/2010	7:21:26 PM	PH3 valve closed
7/14/2010	7:21:26 PM	SiCl4 pre valve closed
7/14/2010	7:21:26 PM	SiCl4 post valve closed
7/14/2010	7:21:26 PM	Bubbler valve closed
7/14/2010	7:21:26 PM	Main Vac valve opened
7/14/2010	7:21:26 PM	Bypass valve opened
7/14/2010	7:21:26 PM	Helium MFC set to  0.000000
7/14/2010	7:21:26 PM	H2 MFC set to  0.000000
7/14/2010	7:21:26 PM	BCl3 MFC set to  0.000000
7/14/2010	7:21:27 PM	PHl3 MFC set to  0.000000
7/14/2010	7:21:27 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:21:27 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:21:27 PM	Tube furnace set to 0
7/14/2010	7:21:27 PM	H2 valve closed
7/14/2010	7:21:27 PM	BCl3 valve closed
7/14/2010	7:21:27 PM	PH3 valve closed
7/14/2010	7:21:27 PM	SiCl4 pre valve closed
7/14/2010	7:21:27 PM	SiCl4 post valve closed
7/14/2010	7:21:27 PM	Main Vac valve closed
7/14/2010	7:21:27 PM	Bypass valve closed
7/14/2010	7:21:27 PM	Bubbler valve closed
7/14/2010	7:21:27 PM	Helium valve opened
7/14/2010	7:21:27 PM	Helium MFC set to  500.000000
7/14/2010	7:21:27 PM	H2 MFC set to  0.000000
7/14/2010	7:21:27 PM	BCl3 MFC set to  0.000000
7/14/2010	7:21:27 PM	PHl3 MFC set to  0.000000
7/14/2010	7:21:27 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:21:27 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:21:27 PM	Tube furnace set to 0
7/14/2010	7:21:37 PM	H2 valve closed
7/14/2010	7:21:37 PM	BCl3 valve closed
7/14/2010	7:21:37 PM	PH3 valve closed
7/14/2010	7:21:37 PM	SiCl4 pre valve closed
7/14/2010	7:21:37 PM	SiCl4 post valve closed
7/14/2010	7:21:37 PM	Main Vac valve closed
7/14/2010	7:21:37 PM	Bypass valve closed
7/14/2010	7:21:37 PM	Bubbler valve closed
7/14/2010	7:21:37 PM	Helium valve opened
7/14/2010	7:21:37 PM	Helium MFC set to  500.000000
7/14/2010	7:21:37 PM	H2 MFC set to  0.000000
7/14/2010	7:21:37 PM	BCl3 MFC set to  0.000000
7/14/2010	7:21:37 PM	PHl3 MFC set to  0.000000
7/14/2010	7:21:37 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:21:37 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:21:37 PM	Tube furnace set to 0
7/14/2010	7:21:37 PM	Helium valve closed
7/14/2010	7:21:37 PM	H2 valve closed
7/14/2010	7:21:37 PM	BCl3 valve closed
7/14/2010	7:21:37 PM	PH3 valve closed
7/14/2010	7:21:37 PM	SiCl4 pre valve closed
7/14/2010	7:21:37 PM	SiCl4 post valve closed
7/14/2010	7:21:37 PM	Main Vac valve closed
7/14/2010	7:21:37 PM	Bubbler valve closed
7/14/2010	7:21:37 PM	Bypass valve opened
7/14/2010	7:21:37 PM	Helium MFC set to  0.000000
7/14/2010	7:21:37 PM	H2 MFC set to  0.000000
7/14/2010	7:21:37 PM	BCl3 MFC set to  0.000000
7/14/2010	7:21:37 PM	PHl3 MFC set to  0.000000
7/14/2010	7:21:37 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:21:37 PM	Bypass solenoid MFC set to  760.000000
7/14/2010	7:21:38 PM	Tube furnace set to 0
7/14/2010	7:21:38 PM	Baratron reads 96.155012 Torr.  Emergency exit.
7/14/2010	7:22:09 PM	Run finished at 7:22 PM
7/14/2010	7:22:24 PM	Program exited cleanly
7/14/2010	7:24:48 PM	Program started normally
7/14/2010	7:24:48 PM	Helium valve closed
7/14/2010	7:24:48 PM	H2 valve closed
7/14/2010	7:24:48 PM	BCl3 valve closed
7/14/2010	7:24:48 PM	PH3 valve closed
7/14/2010	7:24:48 PM	SiCl4 pre valve closed
7/14/2010	7:24:48 PM	SiCl4 post valve closed
7/14/2010	7:24:48 PM	Main Vac valve closed
7/14/2010	7:24:48 PM	Bypass valve closed
7/14/2010	7:24:48 PM	Bubbler valve closed
7/14/2010	7:24:48 PM	Helium MFC set to  0.000000
7/14/2010	7:24:48 PM	H2 MFC set to  0.000000
7/14/2010	7:24:48 PM	BCl3 MFC set to  0.000000
7/14/2010	7:24:48 PM	PHl3 MFC set to  0.000000
7/14/2010	7:24:48 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:24:48 PM	Bypass solenoid MFC set to  760.000000
7/14/2010	7:24:48 PM	Tube furnace set to 0
7/14/2010	7:24:59 PM	Recipe started at 7:24 PM
7/14/2010	7:24:59 PM	Helium valve closed
7/14/2010	7:24:59 PM	H2 valve closed
7/14/2010	7:24:59 PM	BCl3 valve closed
7/14/2010	7:24:59 PM	PH3 valve closed
7/14/2010	7:24:59 PM	SiCl4 pre valve closed
7/14/2010	7:24:59 PM	SiCl4 post valve closed
7/14/2010	7:24:59 PM	Bubbler valve closed
7/14/2010	7:24:59 PM	Main Vac valve opened
7/14/2010	7:24:59 PM	Bypass valve opened
7/14/2010	7:24:59 PM	Helium MFC set to  0.000000
7/14/2010	7:24:59 PM	H2 MFC set to  0.000000
7/14/2010	7:24:59 PM	BCl3 MFC set to  0.000000
7/14/2010	7:24:59 PM	PHl3 MFC set to  0.000000
7/14/2010	7:24:59 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:24:59 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:24:59 PM	Tube furnace set to 0
7/14/2010	7:24:59 PM	H2 valve closed
7/14/2010	7:24:59 PM	BCl3 valve closed
7/14/2010	7:24:59 PM	PH3 valve closed
7/14/2010	7:24:59 PM	SiCl4 pre valve closed
7/14/2010	7:24:59 PM	SiCl4 post valve closed
7/14/2010	7:24:59 PM	Main Vac valve closed
7/14/2010	7:24:59 PM	Bypass valve closed
7/14/2010	7:24:59 PM	Bubbler valve closed
7/14/2010	7:24:59 PM	Helium valve opened
7/14/2010	7:24:59 PM	Helium MFC set to  500.000000
7/14/2010	7:24:59 PM	H2 MFC set to  0.000000
7/14/2010	7:24:59 PM	BCl3 MFC set to  0.000000
7/14/2010	7:24:59 PM	PHl3 MFC set to  0.000000
7/14/2010	7:24:59 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:24:59 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:24:59 PM	Tube furnace set to 0
7/14/2010	7:25:09 PM	H2 valve closed
7/14/2010	7:25:09 PM	BCl3 valve closed
7/14/2010	7:25:09 PM	PH3 valve closed
7/14/2010	7:25:09 PM	SiCl4 pre valve closed
7/14/2010	7:25:09 PM	SiCl4 post valve closed
7/14/2010	7:25:09 PM	Main Vac valve closed
7/14/2010	7:25:09 PM	Bypass valve closed
7/14/2010	7:25:09 PM	Bubbler valve closed
7/14/2010	7:25:09 PM	Helium valve opened
7/14/2010	7:25:09 PM	Helium MFC set to  500.000000
7/14/2010	7:25:09 PM	H2 MFC set to  0.000000
7/14/2010	7:25:09 PM	BCl3 MFC set to  0.000000
7/14/2010	7:25:09 PM	PHl3 MFC set to  0.000000
7/14/2010	7:25:09 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:25:09 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:25:10 PM	Tube furnace set to 0
7/14/2010	7:25:10 PM	Helium valve closed
7/14/2010	7:25:10 PM	H2 valve closed
7/14/2010	7:25:10 PM	BCl3 valve closed
7/14/2010	7:25:10 PM	PH3 valve closed
7/14/2010	7:25:10 PM	SiCl4 pre valve closed
7/14/2010	7:25:10 PM	SiCl4 post valve closed
7/14/2010	7:25:10 PM	Main Vac valve closed
7/14/2010	7:25:10 PM	Bubbler valve closed
7/14/2010	7:25:10 PM	Bypass valve closed
7/14/2010	7:25:10 PM	Helium MFC set to  0.000000
7/14/2010	7:25:10 PM	H2 MFC set to  0.000000
7/14/2010	7:25:10 PM	BCl3 MFC set to  0.000000
7/14/2010	7:25:10 PM	PHl3 MFC set to  0.000000
7/14/2010	7:25:10 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:25:10 PM	Bypass solenoid MFC set to  760.000000
7/14/2010	7:25:10 PM	Tube furnace set to 0
7/14/2010	7:25:10 PM	Baratron reads 98.196669 Torr.  Emergency exit.
7/14/2010	7:25:18 PM	Run finished at 7:25 PM
7/14/2010	7:25:34 PM	Helium valve closed
7/14/2010	7:25:35 PM	Bubbler valve closed
7/14/2010	7:25:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	7:25:38 PM	Recipe started at 7:25 PM
7/14/2010	7:25:38 PM	Helium valve closed
7/14/2010	7:25:38 PM	H2 valve closed
7/14/2010	7:25:38 PM	BCl3 valve closed
7/14/2010	7:25:38 PM	PH3 valve closed
7/14/2010	7:25:38 PM	SiCl4 pre valve closed
7/14/2010	7:25:38 PM	SiCl4 post valve closed
7/14/2010	7:25:38 PM	Main Vac valve closed
7/14/2010	7:25:38 PM	Bubbler valve closed
7/14/2010	7:25:38 PM	Bypass valve opened
7/14/2010	7:25:38 PM	Helium MFC set to  0.000000
7/14/2010	7:25:38 PM	H2 MFC set to  0.000000
7/14/2010	7:25:38 PM	BCl3 MFC set to  0.000000
7/14/2010	7:25:38 PM	PHl3 MFC set to  0.000000
7/14/2010	7:25:38 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:25:38 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:25:38 PM	Tube furnace set to 0
7/14/2010	7:25:46 PM	Helium valve closed
7/14/2010	7:25:46 PM	H2 valve closed
7/14/2010	7:25:46 PM	BCl3 valve closed
7/14/2010	7:25:46 PM	PH3 valve closed
7/14/2010	7:25:46 PM	SiCl4 pre valve closed
7/14/2010	7:25:46 PM	SiCl4 post valve closed
7/14/2010	7:25:46 PM	Bubbler valve closed
7/14/2010	7:25:46 PM	Main Vac valve opened
7/14/2010	7:25:46 PM	Bypass valve opened
7/14/2010	7:25:46 PM	Helium MFC set to  0.000000
7/14/2010	7:25:46 PM	H2 MFC set to  0.000000
7/14/2010	7:25:47 PM	BCl3 MFC set to  0.000000
7/14/2010	7:25:47 PM	PHl3 MFC set to  0.000000
7/14/2010	7:25:47 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:25:47 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:25:47 PM	Tube furnace set to 0
7/14/2010	7:25:47 PM	Run finished at 7:25 PM
7/14/2010	7:25:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	7:25:59 PM	Recipe started at 7:25 PM
7/14/2010	7:25:59 PM	Helium valve closed
7/14/2010	7:25:59 PM	H2 valve closed
7/14/2010	7:25:59 PM	BCl3 valve closed
7/14/2010	7:25:59 PM	PH3 valve closed
7/14/2010	7:25:59 PM	SiCl4 pre valve closed
7/14/2010	7:25:59 PM	SiCl4 post valve closed
7/14/2010	7:25:59 PM	Bubbler valve closed
7/14/2010	7:25:59 PM	Main Vac valve opened
7/14/2010	7:25:59 PM	Bypass valve opened
7/14/2010	7:25:59 PM	Helium MFC set to  0.000000
7/14/2010	7:25:59 PM	H2 MFC set to  0.000000
7/14/2010	7:25:59 PM	BCl3 MFC set to  0.000000
7/14/2010	7:25:59 PM	PHl3 MFC set to  0.000000
7/14/2010	7:25:59 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:25:59 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:25:59 PM	Tube furnace set to 0
7/14/2010	7:25:59 PM	H2 valve closed
7/14/2010	7:25:59 PM	BCl3 valve closed
7/14/2010	7:25:59 PM	PH3 valve closed
7/14/2010	7:25:59 PM	SiCl4 pre valve closed
7/14/2010	7:25:59 PM	SiCl4 post valve closed
7/14/2010	7:25:59 PM	Main Vac valve closed
7/14/2010	7:25:59 PM	Bypass valve closed
7/14/2010	7:25:59 PM	Bubbler valve closed
7/14/2010	7:25:59 PM	Helium valve opened
7/14/2010	7:25:59 PM	Helium MFC set to  500.000000
7/14/2010	7:25:59 PM	H2 MFC set to  0.000000
7/14/2010	7:25:59 PM	BCl3 MFC set to  0.000000
7/14/2010	7:25:59 PM	PHl3 MFC set to  0.000000
7/14/2010	7:25:59 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:25:59 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:26:00 PM	Tube furnace set to 0
7/14/2010	7:26:10 PM	H2 valve closed
7/14/2010	7:26:10 PM	BCl3 valve closed
7/14/2010	7:26:10 PM	PH3 valve closed
7/14/2010	7:26:10 PM	SiCl4 pre valve closed
7/14/2010	7:26:10 PM	SiCl4 post valve closed
7/14/2010	7:26:10 PM	Main Vac valve closed
7/14/2010	7:26:10 PM	Bypass valve closed
7/14/2010	7:26:10 PM	Bubbler valve closed
7/14/2010	7:26:10 PM	Helium valve opened
7/14/2010	7:26:10 PM	Helium MFC set to  500.000000
7/14/2010	7:26:10 PM	H2 MFC set to  0.000000
7/14/2010	7:26:10 PM	BCl3 MFC set to  0.000000
7/14/2010	7:26:10 PM	PHl3 MFC set to  0.000000
7/14/2010	7:26:10 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:26:10 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:26:10 PM	Tube furnace set to 0
7/14/2010	7:26:10 PM	Helium valve closed
7/14/2010	7:26:10 PM	H2 valve closed
7/14/2010	7:26:10 PM	BCl3 valve closed
7/14/2010	7:26:10 PM	PH3 valve closed
7/14/2010	7:26:10 PM	SiCl4 pre valve closed
7/14/2010	7:26:10 PM	SiCl4 post valve closed
7/14/2010	7:26:10 PM	Main Vac valve closed
7/14/2010	7:26:10 PM	Bubbler valve closed
7/14/2010	7:26:10 PM	Bypass valve closed
7/14/2010	7:26:10 PM	Helium MFC set to  0.000000
7/14/2010	7:26:10 PM	H2 MFC set to  0.000000
7/14/2010	7:26:10 PM	BCl3 MFC set to  0.000000
7/14/2010	7:26:10 PM	PHl3 MFC set to  0.000000
7/14/2010	7:26:10 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:26:10 PM	Bypass solenoid MFC set to  760.000000
7/14/2010	7:26:10 PM	Tube furnace set to 0
7/14/2010	7:26:10 PM	Baratron reads 97.175841 Torr.  Emergency exit.
7/14/2010	7:26:18 PM	Run finished at 7:26 PM
7/14/2010	7:26:23 PM	Helium valve closed
7/14/2010	7:26:24 PM	Bubbler valve closed
7/14/2010	7:26:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	7:26:27 PM	Recipe started at 7:26 PM
7/14/2010	7:26:27 PM	Helium valve closed
7/14/2010	7:26:27 PM	H2 valve closed
7/14/2010	7:26:27 PM	BCl3 valve closed
7/14/2010	7:26:27 PM	PH3 valve closed
7/14/2010	7:26:27 PM	SiCl4 pre valve closed
7/14/2010	7:26:27 PM	SiCl4 post valve closed
7/14/2010	7:26:27 PM	Main Vac valve closed
7/14/2010	7:26:27 PM	Bubbler valve closed
7/14/2010	7:26:27 PM	Bypass valve opened
7/14/2010	7:26:27 PM	Helium MFC set to  0.000000
7/14/2010	7:26:27 PM	H2 MFC set to  0.000000
7/14/2010	7:26:27 PM	BCl3 MFC set to  0.000000
7/14/2010	7:26:27 PM	PHl3 MFC set to  0.000000
7/14/2010	7:26:27 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:26:27 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:26:27 PM	Tube furnace set to 0
7/14/2010	7:26:36 PM	Helium valve closed
7/14/2010	7:26:36 PM	H2 valve closed
7/14/2010	7:26:36 PM	BCl3 valve closed
7/14/2010	7:26:36 PM	PH3 valve closed
7/14/2010	7:26:36 PM	SiCl4 pre valve closed
7/14/2010	7:26:36 PM	SiCl4 post valve closed
7/14/2010	7:26:36 PM	Bubbler valve closed
7/14/2010	7:26:36 PM	Main Vac valve opened
7/14/2010	7:26:36 PM	Bypass valve opened
7/14/2010	7:26:36 PM	Helium MFC set to  0.000000
7/14/2010	7:26:36 PM	H2 MFC set to  0.000000
7/14/2010	7:26:36 PM	BCl3 MFC set to  0.000000
7/14/2010	7:26:36 PM	PHl3 MFC set to  0.000000
7/14/2010	7:26:36 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:26:36 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:26:36 PM	Tube furnace set to 0
7/14/2010	7:26:36 PM	Run finished at 7:26 PM
7/14/2010	7:26:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	7:26:42 PM	Program exited cleanly
7/14/2010	7:28:57 PM	Program started normally
7/14/2010	7:28:58 PM	Helium valve closed
7/14/2010	7:28:58 PM	H2 valve closed
7/14/2010	7:28:58 PM	BCl3 valve closed
7/14/2010	7:28:58 PM	PH3 valve closed
7/14/2010	7:28:58 PM	SiCl4 pre valve closed
7/14/2010	7:28:58 PM	SiCl4 post valve closed
7/14/2010	7:28:58 PM	Main Vac valve closed
7/14/2010	7:28:58 PM	Bypass valve closed
7/14/2010	7:28:58 PM	Bubbler valve closed
7/14/2010	7:28:58 PM	Helium MFC set to  0.000000
7/14/2010	7:28:58 PM	H2 MFC set to  0.000000
7/14/2010	7:28:58 PM	BCl3 MFC set to  0.000000
7/14/2010	7:28:58 PM	PHl3 MFC set to  0.000000
7/14/2010	7:28:58 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:28:58 PM	Bypass solenoid MFC set to  760.000000
7/14/2010	7:28:58 PM	Tube furnace set to 0
7/14/2010	7:29:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	7:29:02 PM	Recipe started at 7:29 PM
7/14/2010	7:29:02 PM	Helium valve closed
7/14/2010	7:29:02 PM	H2 valve closed
7/14/2010	7:29:02 PM	BCl3 valve closed
7/14/2010	7:29:02 PM	PH3 valve closed
7/14/2010	7:29:02 PM	SiCl4 pre valve closed
7/14/2010	7:29:02 PM	SiCl4 post valve closed
7/14/2010	7:29:02 PM	Main Vac valve closed
7/14/2010	7:29:02 PM	Bubbler valve closed
7/14/2010	7:29:02 PM	Bypass valve opened
7/14/2010	7:29:02 PM	Helium MFC set to  0.000000
7/14/2010	7:29:02 PM	H2 MFC set to  0.000000
7/14/2010	7:29:02 PM	BCl3 MFC set to  0.000000
7/14/2010	7:29:02 PM	PHl3 MFC set to  0.000000
7/14/2010	7:29:02 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:29:02 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:29:02 PM	Tube furnace set to 0
7/14/2010	7:29:03 PM	Helium valve closed
7/14/2010	7:29:03 PM	H2 valve closed
7/14/2010	7:29:03 PM	BCl3 valve closed
7/14/2010	7:29:03 PM	PH3 valve closed
7/14/2010	7:29:03 PM	SiCl4 pre valve closed
7/14/2010	7:29:03 PM	SiCl4 post valve closed
7/14/2010	7:29:03 PM	Bubbler valve closed
7/14/2010	7:29:03 PM	Main Vac valve opened
7/14/2010	7:29:03 PM	Bypass valve opened
7/14/2010	7:29:03 PM	Helium MFC set to  0.000000
7/14/2010	7:29:03 PM	H2 MFC set to  0.000000
7/14/2010	7:29:03 PM	BCl3 MFC set to  0.000000
7/14/2010	7:29:03 PM	PHl3 MFC set to  0.000000
7/14/2010	7:29:03 PM	SiCl4 MFC set to  0.000000
7/14/2010	7:29:03 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	7:29:03 PM	Tube furnace set to 0
7/14/2010	7:29:03 PM	Run finished at 7:29 PM
7/14/2010	7:29:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	8:38:04 PM	Tube furnace set to 100
7/14/2010	8:38:08 PM	Bypass valve closed
7/14/2010	8:38:08 PM	Main Vac valve closed
7/14/2010	8:38:13 PM	Main Vac valve opened
7/14/2010	8:38:14 PM	Bypass valve opened
7/14/2010	8:43:29 PM	Recipe started at 8:43 PM
7/14/2010	8:43:29 PM	Helium valve closed
7/14/2010	8:43:29 PM	BCl3 valve closed
7/14/2010	8:43:29 PM	PH3 valve closed
7/14/2010	8:43:29 PM	SiCl4 pre valve closed
7/14/2010	8:43:29 PM	SiCl4 post valve closed
7/14/2010	8:43:29 PM	Main Vac valve closed
7/14/2010	8:43:29 PM	Bypass valve closed
7/14/2010	8:43:29 PM	Bubbler valve closed
7/14/2010	8:43:29 PM	H2 valve opened
7/14/2010	8:43:29 PM	Helium MFC set to  0.000000
7/14/2010	8:43:29 PM	H2 MFC set to  500.000000
7/14/2010	8:43:29 PM	BCl3 MFC set to  0.000000
7/14/2010	8:43:29 PM	PHl3 MFC set to  0.000000
7/14/2010	8:43:29 PM	SiCl4 MFC set to  0.000000
7/14/2010	8:43:29 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	8:43:29 PM	Tube furnace set to 100
7/14/2010	8:44:49 PM	Helium valve closed
7/14/2010	8:44:49 PM	BCl3 valve closed
7/14/2010	8:44:49 PM	PH3 valve closed
7/14/2010	8:44:49 PM	SiCl4 pre valve closed
7/14/2010	8:44:49 PM	SiCl4 post valve closed
7/14/2010	8:44:49 PM	Main Vac valve closed
7/14/2010	8:44:49 PM	Bypass valve closed
7/14/2010	8:44:49 PM	H2 valve opened
7/14/2010	8:44:49 PM	Bubbler valve opened
7/14/2010	8:44:49 PM	Helium MFC set to  0.000000
7/14/2010	8:44:49 PM	H2 MFC set to  500.000000
7/14/2010	8:44:49 PM	BCl3 MFC set to  0.000000
7/14/2010	8:44:49 PM	PHl3 MFC set to  0.000000
7/14/2010	8:44:49 PM	SiCl4 MFC set to  0.000000
7/14/2010	8:44:49 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	8:44:49 PM	Tube furnace set to 1000
7/14/2010	9:04:49 PM	Helium valve closed
7/14/2010	9:04:49 PM	PH3 valve closed
7/14/2010	9:04:49 PM	Main Vac valve closed
7/14/2010	9:04:49 PM	Bypass valve closed
7/14/2010	9:04:49 PM	H2 valve opened
7/14/2010	9:04:49 PM	BCl3 valve opened
7/14/2010	9:04:49 PM	SiCl4 pre valve opened
7/14/2010	9:04:49 PM	SiCl4 post valve opened
7/14/2010	9:04:49 PM	Bubbler valve opened
7/14/2010	9:04:49 PM	Helium MFC set to  0.000000
7/14/2010	9:04:49 PM	H2 MFC set to  500.000000
7/14/2010	9:04:49 PM	BCl3 MFC set to  15.000000
7/14/2010	9:04:49 PM	PHl3 MFC set to  0.000000
7/14/2010	9:04:49 PM	SiCl4 MFC set to  50.000000
7/14/2010	9:04:49 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	9:04:49 PM	Tube furnace set to 1000
7/14/2010	9:08:49 PM	H2 valve closed
7/14/2010	9:08:49 PM	BCl3 valve closed
7/14/2010	9:08:49 PM	PH3 valve closed
7/14/2010	9:08:49 PM	SiCl4 pre valve closed
7/14/2010	9:08:49 PM	SiCl4 post valve closed
7/14/2010	9:08:49 PM	Main Vac valve closed
7/14/2010	9:08:49 PM	Bypass valve closed
7/14/2010	9:08:49 PM	Helium valve opened
7/14/2010	9:08:49 PM	Bubbler valve opened
7/14/2010	9:08:49 PM	Helium MFC set to  500.000000
7/14/2010	9:08:49 PM	H2 MFC set to  0.000000
7/14/2010	9:08:49 PM	BCl3 MFC set to  0.000000
7/14/2010	9:08:49 PM	PHl3 MFC set to  0.000000
7/14/2010	9:08:49 PM	SiCl4 MFC set to  0.000000
7/14/2010	9:08:49 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	9:08:49 PM	Tube furnace set to 0
7/14/2010	9:28:49 PM	Helium valve closed
7/14/2010	9:28:49 PM	H2 valve closed
7/14/2010	9:28:49 PM	BCl3 valve closed
7/14/2010	9:28:49 PM	PH3 valve closed
7/14/2010	9:28:49 PM	SiCl4 pre valve closed
7/14/2010	9:28:49 PM	SiCl4 post valve closed
7/14/2010	9:28:49 PM	Main Vac valve closed
7/14/2010	9:28:49 PM	Bypass valve closed
7/14/2010	9:28:49 PM	Bubbler valve closed
7/14/2010	9:28:49 PM	Helium MFC set to  0.000000
7/14/2010	9:28:49 PM	H2 MFC set to  0.000000
7/14/2010	9:28:49 PM	BCl3 MFC set to  0.000000
7/14/2010	9:28:49 PM	PHl3 MFC set to  0.000000
7/14/2010	9:28:49 PM	SiCl4 MFC set to  0.000000
7/14/2010	9:28:49 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	9:28:49 PM	Tube furnace set to 0
7/14/2010	9:28:50 PM	Run finished at 9:28 PM
7/14/2010	9:30:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2010	9:30:27 PM	Recipe started at 9:30 PM
7/14/2010	9:30:27 PM	Helium valve closed
7/14/2010	9:30:27 PM	H2 valve closed
7/14/2010	9:30:27 PM	BCl3 valve closed
7/14/2010	9:30:27 PM	PH3 valve closed
7/14/2010	9:30:27 PM	SiCl4 pre valve closed
7/14/2010	9:30:27 PM	SiCl4 post valve closed
7/14/2010	9:30:27 PM	Main Vac valve closed
7/14/2010	9:30:27 PM	Bubbler valve closed
7/14/2010	9:30:27 PM	Bypass valve opened
7/14/2010	9:30:27 PM	Helium MFC set to  0.000000
7/14/2010	9:30:27 PM	H2 MFC set to  0.000000
7/14/2010	9:30:27 PM	BCl3 MFC set to  0.000000
7/14/2010	9:30:27 PM	PHl3 MFC set to  0.000000
7/14/2010	9:30:27 PM	SiCl4 MFC set to  0.000000
7/14/2010	9:30:27 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	9:30:27 PM	Tube furnace set to 0
7/14/2010	9:31:00 PM	Helium valve closed
7/14/2010	9:31:00 PM	H2 valve closed
7/14/2010	9:31:00 PM	BCl3 valve closed
7/14/2010	9:31:00 PM	PH3 valve closed
7/14/2010	9:31:00 PM	SiCl4 pre valve closed
7/14/2010	9:31:00 PM	SiCl4 post valve closed
7/14/2010	9:31:00 PM	Bubbler valve closed
7/14/2010	9:31:00 PM	Main Vac valve opened
7/14/2010	9:31:00 PM	Bypass valve opened
7/14/2010	9:31:00 PM	Helium MFC set to  0.000000
7/14/2010	9:31:00 PM	H2 MFC set to  0.000000
7/14/2010	9:31:00 PM	BCl3 MFC set to  0.000000
7/14/2010	9:31:00 PM	PHl3 MFC set to  0.000000
7/14/2010	9:31:00 PM	SiCl4 MFC set to  0.000000
7/14/2010	9:31:00 PM	Bypass solenoid MFC set to  0.000000
7/14/2010	9:31:01 PM	Tube furnace set to 0
7/14/2010	9:31:01 PM	Run finished at 9:31 PM
7/14/2010	9:31:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
